Program Chair: Jin-Seong Park
Hanyang University, South Korea
Program Co-Chair: Hanjin Lim
Samsung Electronics, South Korea
Program Co-Chair: HyunChul Choi
LG Display, South Korea
ALD Program Committee:
- Ji-Hoon Ahn (Korea Maritime & Ocean University, South Korea)
- Parag Banerjee (Washington University, St. Louis, USA)
- Sean Barry (Carlton University, Canada)
- Stacey Bent (Standford University, USA)
- Iain Buchanan (Versum Materials, UK)
- Rong Chen (Huazhong University of Science and Technology, China)
- Taek-Mo Chung (KRICT, South Korea)
- Robert Clark (TEL, USA)
- Scott Clendenning (Intel, USA)
- John F. Conley, Jr. (Oregon State University, USA)
- Neil Dasgupta (University of Michigan, USA)
- Charles L. Dezelah (EMD Performance Materials, USA)
- Christophe Detavernier (University of Ghent, Belgium)
- Christian Dussarrat (Air Liquide, France)
- Simon Elliott (Schrödinger, Ireland)
- Dennis Hausmann (Lam Research, USA)
- Se-Aug Jang (SK hynix, South Korea)
- Jiyoung Kim (University of Texas at Dallas, USA)
- Soo-Hyun Kim (Yeungnam University, South Korea)
- Young-Beom Kim (Hanyang University, Korea)
- Mato Knez (Nanogune, Spain)
- Harm Knoops (Oxford Instruments, UK)
- Se-Hun Kwon (Pusan National University, South Korea)
- Han-Bo-Ram Lee (Incheon National University, South Korea)
- Kwang-Su Lim (LG Display, South Korea)
- Mike McSwiney (Intel, USA)
- Yongfeng Mei (Fudan University, China)
- Yo-Sep Min (Konkuk University, South Korea)
- Chang-Yong Nam (Brookhaven National Lab, USA)
- Tae Joo Park (Hanyang University, South Korea)
- Paul Poodt (TNO/Holst Center, The Netherlands)
- Matti Putkonen (VTT, Finland)
- Mikko Ritala (University of Helsinki, Finland)
- Simon Rushworth (EpiValence, UK)
- Uwe Schroeder (Namlab, Germany)
- Nicholas Strandwitz (Lehigh University, USA)
- Ganesh Sundaram (Veeco, USA)
- Jonas Sundqvist (Fraunhofer IKTS, Germany)
- Myung Mo Sung (Hanyang University, South Korea)
- Christophe Vallee (LETI-LTM, France)
- Charles Winter (Wayne State University, USA)
- Won Seok Yoo (Samsung Electronics, South Korea)
ALD Poster Chair:
- Adrien LaVoie (Lam Research, USA)
- Won-Jun Lee (Sejong University, South Korea)
ALD Social Media Chair:
- Jeong Hwan Han (Seoul National University of Science and Technology, South Korea)
- Riikka Puurunen (Aalto University, Finland)
ALD International Advisory Committee:
- Jeffrey Elam (Argonne National Lab, USA)
- Annelies Delabie (IMEC, Belgium)
- Steven George (University of Colorado at Boulder, USA)
- Roy Gordon (Harvard University, USA)
- Suvi Haukka (ASM, Finland)
- Cheol Seong Hwang (Seoul National University, South Korea)
- Hyeongtag Jeon (Hanyang University, South Korea)
- Erwin Kessels (University of Eindhoven, The Netherlands)
- Hyungjun Kim (Yonsei University, South Korea)
- Sang In Lee (Synos Foundation, USA)
- Markku Leskelä (University of Helsinki, Finland)
- Gregory N. Parsons (North Carolina State University, USA)
- Virginia Wheeler (U.S. Naval Research Lab, USA)
ALE Program Chairs:
Program Chair: Geun Young Yeom
Sungkyunkwan University, South Korea
Program Co-Chair: Ankur Agarwal
KLA-Tencor, USA
ALE Program Committee:
- David Boris (Naval Research Lab, USA)
- Hee Yeop Chae (SKKU, South Korea)
- Jean-Francois de Marneffe (IMEC, Belgium)
- Bert Ellingboe (Dublin City University, Ireland)
- Steve George (University of Colorado at Boulder, USA)
- Satoshi Hamaguchi (Osaka University, Japan)
- Craig Huffman (Micron, USA)
- Eric Joseph (IBM, USA)
- Keren Kanarik (Lam Research, USA)
- Harm Knoops (Oxford Instruments, The Netherlands)
- Minsuk Lee (SK Hynix, South Korea)
- Venkat Pallem (Air Liquide, USA)
- Alok Ranjan (TEL, USA)
- Fred Roozeboom (TUe The Netherlands)
- Dmitry Suyatin (Lund University, Sweden)
- Tetsuya Tatsumi (Sony, Japan)
- Wei Tian (Applied Materials, USA)